Timing the Replacement of Filters for CMP Slurry Processing

The customer installed the AccuSizer Mini online particle size analyzer utilizing the FX sensor downstream of the filter in the supply line. The Figure below shows large particle count (LPC) data in particles/mL > 1.0 µm as a function of time. Once the AccuSizer Mini was installed the determination of when to change the filter was based on the LPC count, rather than just time or throughput. This optimized the filter schedule and saved considerable money in filter expense.

Timing the Replacement of Filters for CMP Slurry Processing

LPC vs. Time Downstream of the Supply Line Filter

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