Ceria CMP Slurry Monitoring

Ceria CMP Slurry Monitoring

The AccuSizer is the Best Tool to Measure Particle Size and Concentration in Ceria CMP Slurry Monitoring

Cerium oxide (ceria) based slurries are becoming more widely used in a variety of chemical mechanical planarization (CMP) applications for integrated circuit (IC) manufacture. A short study proved how the PSS AccuSizer FX Mini can accurately measure the size and concentration of ceria CMP slurries and determine the presence of tails to the distribution.

Ceria A was then spiked with 1% (Figure 1) and 10% (Figure 2) of Ceria B that contains a longer tail of larger particles. The results in Figures 1 and 2 show both the sensitivity to tails and the excellent reproducibility of the AccuSizer due to the statistical  confidence  from measuring so many particles.

Ceria CMP Slurry Monitoring - Spiked Ceria CMP 1

Figure 1: Ceria A and ceria A spiked with 1% ceria B

Ceria CMP Slurry Monitoring - Spiked Ceria CMP 2

Figure 1: Ceria A and ceria A spiked with 10% ceria B

Visit the Documentation Download Center to download Application Note 742; Ceria CMP Slurries for more details.