Chemical Mechanical Polishing

Chemical Mechanical Polishing

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The PSS AccuSizer is recognized as the most accurate and sensitive system for detecting large particle counts (LPC) in CMP slurries. While laser diffraction can measure the mean size of the distribution well, the single particle optical sizing (SPOS) technique in the AccuSizer is hundreds of times for sensitive to tails/LPC.

Download the application note on sensitivity to tails

Chemical Mechanical Polishing

The most popular system for this application is the Point of Use online system. Click the AccuSizer image for more details.AccuSizer POU Image

Available with no dilution, or autodilution if required

Three sensor options - optimized for your slurry

Up to 512 size channels

Statistical accuracy - 300,000 counts/min

Built in touch PC

ROI in months, not years

Read the sections below for additional information on these applications.